Semiconductor-On-Insulator materials for nanoelectronics applications [Electronic resource] / ed. A. Nazarov [et al.]. - Electronic text data. - Berlin ; Heidelberg : Springer-Verlag, 2011. - (Engineering materials, ISSN 1612-1317). - ISBN 978-3-642-15868-1 : Б. ц. Рубрики: Engineering    Nanotechnology    Surfaces (physics)    Engineering    Nanotechnology and microengineering    Nanotechnology    Semiconductors    Characterization and evaluation of materials См. : Текст издания Доп.точки доступа: Nazarov, A. \ed.\; SpringerLink (Online service) Свободных экз. нет