Adams, T. M.     Introductory mems [Electronic resource] : fabrication and applications / T. M. Adams, R. A. Layton. - Electronic text data. - Boston, Ma : Springer Science+Business Media LLC, 2010. - ISBN 978-0-387-09511-0 : Б. ц. Рубрики: Engineering    Mechanics    Materials    Electronics    Systems engineering    Surfaces (physics)    Engineering    Electronics and microelectronics, instrumentation    Circuits and systems    Mechanics    Surfaces and interfaces, thin films    Continuum mechanics and mechanics of materials См. : Текст издания Доп.точки доступа: Layton, R.A.; SpringerLink (Online service) Свободных экз. нет